Upper electrode assembly

Abstract

The present disclosure relates to an upper electrode assembly. The upper electrode assembly comprises a bush assembly fastened to an insertion hole of a plasma electrode plate, and a lift bar received in a receiving space of an electrode support plate and configured to detachably couple the plasma electrode plate to the electrode support plate. The bush assembly comprises a bush configured to be coupled to the lift bar. The lift bar comprises a coupling portion configured to couple with the bush. The coupling portion comprises a bush insertion groove into which the bush is inserted, a first path configured to allow the lift bar to move in an axial direction with the bush inserted, and a second path configured to allow the lift bar to rotate with the bush positioned at an end of the first path.

Dependencies are inferred from the claim text.