System and method for delivering pulsed RF power from a single generator to distributed plasma sources of a semiconductor process system
AssigneeInspiring Atoms Pte Ltd
InventorYang Pan
Life of this patent
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Abstract
Disclosed is a system and method for delivering pulsed RF power from a single generator to multiple distributed plasma sources in a semiconductor process system. A Single-Pole Multi-Throw (SPMT) switch, dynamically controlled in real time, selectively routes individual pulses or groups of pulses to designated plasma sources. Each pulse can be independently configured with specific RF power, frequency, and duration, allowing precise and adaptable power distribution to components such as the center and multiple edge coils of a transformer coupled plasma (TCP) source.
Claims20
An RF system for a semiconductor process system, comprising:
- an RF power generator configured to generate RF power in the form of a master pulse train;
- a plurality of plasma sources configured to receive a subset of the pulses from the master pulse train, wherein the plasma sources are arranged atop a process chamber configured to generate plasma within the chamber;
- a Single-Pole Multi-Throw (SPMT) switch configured to select a plasma source from the plurality of plasma sources to receive one pulse or a group of the pulses in the master pulse train;
- and
- a controller configured to coordinate the operations of the RF power generator and the SPMT switch.
An RF system for a semiconductor process system, comprising:
- an RF power generator configured to generate RF power in the form of a master pulse train;
- a plurality of plasma sources configured to receive a subset of the pulses from the master pulse train;
- a SPMT switch configured to select a plasma source from the plurality of plasma sources to receive one pulse or a group of the pulses in the master pulse train;
- a sensory system configured to monitor the performance of the RF power delivery to each plasma source;
- a testing load comprising an electronic network configured to mimic the electrical characteristics of the plasma sources;
- and
- a controller configured to coordinate the operations of the RF power generator and the SPMT switch,
- wherein the controller includes an RF digital twin configured to mimic the operations of the RF system, and
- wherein the controller further configured to test the performance of generated pulse trains by utilizing the testing load.
Dependencies are inferred from the claim text.