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US 12,763,287 B2Granted
Bias supply control and data processing
AssigneeAdvanced Energy Industries, Inc.
InventorHien Minh Nguyen
Life of this patent
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Abstract
Bias supplies and plasma processing systems are disclosed. One bias supply comprises an output node, a return node, and a switch network and at least one power supply coupled to the output node and the return node. The switch network and the at least one power supply configured, in combination, to apply an asymmetric periodic voltage waveform and provide a corresponding current waveform at the output node relative to the return node.
Claims20
An apparatus comprising:
- a switch, a first diode, and a first inductance coupled in series between a first node and a second node;
- a second diode and a second inductance coupled in series between the first node and the second node;
- a third inductance coupled between the first node and a third node;
- and
- an active power supply and a fourth inductance coupled in series between the second node and the third node to provide current from the third node to the active power supply.
2 more elements
An apparatus to produce a waveform, the apparatus comprising:
- a switch and a first diode arranged in series and coupled between a first node and a second node, and responsive to the switch being closed, a pulse is initiated at a third node;
- and
- a DC power supply arranged to provide a voltage between the second node and the third node while a ramped voltage is produced after the pulse at the third node.
A method for producing a waveform, the method comprising:
- providing a first unidirectional current pathway between a first node and a second node;
- providing a second unidirectional current pathway between the first node and the second node;
- providing a voltage to the second node;
- and
- repeatedly closing and opening the first unidirectional current pathway while the second unidirectional current pathway remains closed to produce pulses of the waveform at a third node.
2 more elements
Dependencies are inferred from the claim text.