Capacitor structure including oxygen donor layers

A capacitor structure, comprising:

• a first electrode and a second electrode;
• a dielectric layer between the first electrode and the second electrode;
• a first oxygen donor layer between the dielectric layer and the first electrode, wherein an oxygen concentration of the first oxygen donor layer increases along a thickness direction from a first surface proximal to the dielectric layer to a second surface proximal to the first electrode;
• a first conductive layer between the first oxygen donor layer and the dielectric layer;
• and
• a second oxygen donor layer between the dielectric layer and the second electrode the oxygen donor layer, wherein an oxygen concentration of the second oxygen donor layer increases along a thickness direction from a first surface proximal to the dielectric layer to a second surface proximal to the second electrode,
• wherein the first electrode has a concave profile, the first oxygen donor layer, the dielectric layer, and the second oxygen donor layer are conformal with respect to the concave profile of the first electrode,
• wherein a metal atom of the first electrode and a metal atom of the second electrode are different from a metal atom of the first oxygen donor layer and different from a metal atom of the second oxygen donor layer,
• wherein the first conductive layer has a first thickness when a first net negative charge is collected on the first electrode and a second thickness when a second net negative charge is collected on the first electrode, and the second thickness is greater than the first thickness.

A capacitor structure, comprising:

• a first electrode and a second electrode;
• a dielectric layer between the first electrode and the second electrode;
• a first oxygen donor layer between the dielectric layer and the first electrode, wherein an oxygen concentration of the first oxygen donor layer increases along a thickness direction from a first surface proximal to the dielectric layer to a second surface proximal to the first electrode;
• a second oxygen donor layer between the dielectric layer and the second electrode the oxygen donor layer, wherein an oxygen concentration of the second oxygen donor layer increases along a thickness direction from a first surface proximal to the dielectric layer to a second surface proximal to the second electrode;
• a first conductive layer between the first oxygen donor layer and the dielectric layer;
• and
• a second conductive layer between the second oxygen donor layer and the dielectric layer,
• wherein a metal atom of the first electrode and a metal atom of the second electrode are different from a metal atom of the first oxygen donor layer and different from a metal atom of the second oxygen donor layer,
• wherein the first conductive layer has a first thickness when a first net negative charge is collected on the first electrode and a second thickness when a second net negative charge is collected on the first electrode, and the second thickness is greater than the first thickness.