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US 12,763,140 B1Granted
Nonvolatile electrochemical random access memory
AssigneesNational Technology & Engineering Solutions of Sandia, LLC, The Regents of the University of Michigan
InventorsAlbert Alec Talin, Elliot James Fuller, Yiyang Li, Virgil Watkins, Sungmin Diana Kim, Laszlo Cline, Jingxian Li
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Abstract
An ECRAM cell with orders of magnitude longer retention than previously achieved is provided. This retention is achieved by choosing active channel and gate materials that exhibit phase separation, which enables the formation of multiple effectively equilibrium resistance states.
Claims13
An ECRAM device, comprising:
- a solid electrolyte having a first side and a second side;
- a Gate layer of a metal sub-oxide on the first side, the Gate layer having a Gate layer first side in contact with the first side of the solid electrolyte, and a Gate layer second side opposite the Gate layer first side;
- a Channel layer of the metal sub-oxide on the second side, the Channel layer having a Channel layer first side in contact with the second side of the solid electrolyte, and a Channel layer second side opposite the Channel layer first side;
- a first current collector electrically connected to the Gate layer second side;
- a second current collector electrically connected the Channel layer second side;
- and
- a third current collector electrically connected to the Channel layer second side;
- wherein an ion chemical potential in the Channel layer (μ(X1)) equals an ion chemical potential in the Gate layer (μ(X2)) to provide a phase separation of the sub-oxide in the Channel layer;
- and
- wherein the solid electrolyte is an ionic conductor of oxygen vacancies and an electronic insulator.
7 more elements
A method of forming an ECRAM cell, comprising:
- depositing a second and third current collector onto a substrate;
- depositing a Channel layer of a metal sub-oxide upon the second and third current collector;
- depositing a solid electrolyte upon the Channel layer;
- depositing a Gate layer upon the solid electrolyte;
- and
- depositing a first current collector upon the Gate layer;
- wherein an ion chemical potential in the Channel layer (μ(X1)) equals an ion chemical potential in the Gate layer (μ(X2)) to provide a phase separation of the sub-oxide in the Channel layer;
- and
- wherein the solid electrolyte is an ionic conductor of oxygen vacancies and an electronic insulator.
6 more elements
A method of operating an ECRAM cell, comprising:
- providing an ECRAM cell comprising:
- a solid electrolyte having a first side and a second side;
- a Gate layer of a metal sub-oxide disposed on the first side of the solid electrolyte, the Gate layer having a Gate layer first side in contact with the solid electrolyte and a Gate layer second side opposite the Gate layer first side;
- a Channel layer of the metal sub-oxide disposed on the second side of the solid electrolyte, the Channel layer having a Channel layer first side in contact with the second side of the solid electrolyte and a Channel layer second side opposite the Channel layer first side;
- a first current collector electrically connected to the Gate layer second side;
- a second current collector electrically connected the Channel layer second side;
- and
- a third current collector electrically connected to the Channel layer second side;
- applying a voltage across the ECRAM cell to set the state of the Channel layer;
- applying a voltage of 100 mV to the second current collector;
- applying ground to the third current collector;
- and reading the Channel layer current between the second and third current collectors to determine the state of the Channel layer;
- wherein the ECRAM cell configuration provides phase separation in the channel layer;
- wherein an ion chemical potential in the Channel layer (μ(X1)) equals an ion chemical potential in the Gate layer (μ(X2)) to provide the phase separation of the sub-oxide in the Channel layer;
- and wherein the solid electrolyte is an ionic conductor of oxygen vacancies and an electronic insulator.
12 more elements
Dependencies are inferred from the claim text.