Processing apparatus, display method, method of manufacturing semiconductor device and non-transitory computer-readable recording medium

A processing apparatus comprising:

• a process chamber in which a substrate is processed;
• and
• a controller configured to be capable of:
• (a) outputting an alarm indicating an abnormality detected based on sensor information;
• (b) analyzing, with the controller, a cause of the alarm by acquiring analysis items used for analyzing the cause of the alarm, comprising:
• (b1) searching an alarm analysis table with an alarm ID;
• (b2) acquiring the number of the analysis items and analysis item serial numbers;
• and
• (b3) specifying candidates for an item that causes the alarm;
• (c) acquiring a plurality of apparatus data comprising a plurality piece of the sensor information related to the alarm;
• (d) comparing each of the apparatus data with a threshold value;
• and
• (e) when none of the apparatus data acquired in (c) exceed the threshold value according to a comparison result in (d), identifying a specific apparatus data among the plurality of apparatus data closest to the threshold value as a factor of generating the alarm,
• wherein two or more of the apparatus data related to the analysis items are acquired in (c), and
• wherein the alarm analysis table containing at least the analysis items used for analyzing the cause of the alarm is stored, and the alarm analysis table further contains the alarm ID for specifying a type of the alarm;
• the number of items indicating the number of the analysis items used for analyzing the cause of the alarm represented by the alarm ID;
• and analysis item serial numbers for specifying the analysis items.

A method of manufacturing a semiconductor device, comprising:

• (a) processing a substrate;
• (b) outputting an alarm indicating an abnormality detected based on sensor information;
• (c) analyzing, with a controller, a cause of the alarm by acquiring analysis items used for analyzing the cause of the alarm, comprising:
• (c1) searching an alarm analysis table with an alarm ID;
• (c2) acquiring the number of the analysis items and analysis item serial numbers;
• and
• (c3) specifying candidates for an item that causes the alarm;
• (d) acquiring a plurality of apparatus data comprising a plurality piece of the sensor information related to the alarm;
• (e) comparing each of the apparatus data with a threshold value;
• and
• (f) when none of the apparatus data acquired in (d) exceed the threshold value according to a comparison result in (e), identifying a specific apparatus data among the plurality of apparatus data closest to the threshold value as a factor of generating the alarm,
• wherein two or more of the apparatus data related to the analysis items are acquired in (d), and
• wherein the alarm analysis table containing at least the analysis items used for analyzing the cause of the alarm is stored, and the alarm analysis table further contains the alarm ID for specifying a type of the alarm;
• the number of items indicating the number of the analysis items used for analyzing the cause of the alarm represented by the alarm ID;
• and analysis item serial numbers for specifying the analysis items.