Measuring method including measuring an amount of protrusion protruding from a side surface of a lower portion and measuring device having the same
AssigneeMagnolia White Corporation
InventorsSatoru Tomita, Kazuyuki Endou, Kota Makishi
Life of this patent
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Abstract
According to one embodiment, a measuring method includes forming a partition including a lower portion arranged on a first surface side of a base and an upper portion protruding from a side surface of the lower portion, acquiring a first image including the partition, which is generated by emitting electromagnetic waves from the first surface side of the base or a second surface side opposed to the first surface of the base, analyzing the acquired first image, and measuring an amount of protrusion at which the end portion of the upper portion protrudes from the side surface of the lower portion, based on the analysis result.
Claims20
A measuring method comprising:
- forming a partition including a lower portion arranged on a first surface side of a base and an upper portion protruding from a side surface of the lower portion;
- acquiring a first image including the partition, which is generated by emitting electromagnetic waves from the first surface side of the base or a second surface side opposed to the first surface of the base;
- analyzing the acquired first image;
- and
- measuring an amount of protrusion at which an end portion of the upper portion protrudes from the side surface of the lower portion, based on the analysis result.
A measuring device comprising:
- an acquisition unit configured to acquire a first image including a partition, which is generated by emitting electromagnetic waves from a first surface side of a base in which the partition including a lower portion and an upper portion protruding from a side surface of the lower portion is formed on the first surface side, or a second surface side opposed to the first surface of the base;
- an analysis unit configured to analyze the acquired first image;
- and
- a measuring unit configured to measure an amount of protrusion at which an end portion of the upper portion protrudes from the side surface of the lower portion, based on the analysis result.
A measuring device comprising:
- an emitting unit emitting electromagnetic waves from a first surface side of a base in which a partition including a lower portion and an upper portion protruding from a side surface of the lower portion is formed on the first surface side, or a second surface side opposed to the first surface of the base;
- a detecting unit configured to detect the emitted electromagnetic waves;
- an acquisition unit configured to acquire a first image generated based on an intensity of the detected electromagnetic waves;
- an analysis unit configured to analyze the acquired first image;
- and
- a measuring unit configured to measure an amount of protrusion at which an end portion of the upper portion protrudes from the side surface of the lower portion, based on the analysis result.
Dependencies are inferred from the claim text.