Polymers for photoresist and photoresist compositions including the same
AssigneeSamsung Electronics Co., Ltd.
InventorsJuhyeon Park, Hyunwoo Kim, Suk Koo Hong, Su Min Kim, Yechan Kim, Jicheol Park, Honggu Im
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AssigneeSamsung Electronics Co., Ltd.
InventorsJuhyeon Park, Hyunwoo Kim, Suk Koo Hong, Su Min Kim, Yechan Kim, Jicheol Park, Honggu Im
Estimating the term…
A polymer for photoresist and a photoresist composition including the polymer. The polymer for photoresist may include a polymerization unit comprising a sensitizer, and a protection group. The polymerization unit may include a structure of chemical formula 1: wherein R1 is hydrogen, a halogen element, a methyl group, a trifluoromethyl group, a substituted or unsubstituted alkyl group having 1 to 10 carbon atoms, a substituted or unsubstituted aryl group having 6 to 18 carbon atoms, or a substituted or unsubstituted arylalkyl group having 6 to 18 carbon atoms, and n is an integer of 1 to 100,000.
A polymer for photoresist, the polymer comprising:
A photoresist composition comprising:
A photoresist composition comprising:
Dependencies are inferred from the claim text.