Actinic ray-sensitive or radiation-sensitive resin composition, resist film, pattern forming method, and method for manufacturing electronic device

An actinic ray-sensitive or radiation-sensitive resin composition comprising:

• a resin A having a repeating unit a1 having a group represented by any one of General Formula (1), (2), (3), (4), (5), or (6), which is a nonionic group that decomposes upon irradiation with actinic rays or radiation and a content of which is 20% by mole or more with respect to all repeating units;
• and
• an additive B that is at least any one of an acid having an acid group having a pKa of −3.60 or more, or a salt having a structure in which a hydrogen atom of an acid group having a pKa of −3.60 or more is substituted with a cation,
• in General Formulae (1) to (6), * represents a bonding position,
• in General Formula (1), R1 and R2 each independently represent an organic group, and R1 and R2 may be bonded to each other to form a ring;
• in General Formula (2), R3 and R4 each independently represent an organic group, and R3 and R4 may be bonded to each other to form a ring;
• in General Formula (3), R5 and R6 each independently represent a hydrogen atom or an organic group, and R5 and R6 may be bonded to each other to form a ring;
• n represents 0 or 1, and
• Ar represents an aromatic ring group which may have a substituent;
• in General Formula (4), R7 represents an organic group, and
• X represents —CO— or —SO2—;
• in General Formula (5), R8 and R9 each independently represent an organic group, and R8 and R9 may be bonded to each other to form a ring;
• and
• in General Formula (6), R10 and R11 each independently represent an organic group, and R10 and R11 may be bonded to each other to form a ring, and
• wherein any one of the following requirements 1 to 5 is satisfied:
• requirement 1:
• the resin A has a repeating unit having an acid-decomposable group which does not correspond to the group represented by any one of General Formula (1), (2), (3), (4), (5) or (6), and a content of the repeating unit having an acid-decomposable group which does not correspond to the group represented by any one of General Formula (1), (2), (3), (4), (5) or (6) is 10% by mole or more with respect to all the repeating units in the resin A,
• requirement 2:
• the resin A has a repeating unit having a lactone group, and a content of the repeating unit having a lactone group is 10% by mole or more with respect to all the repeating units in the resin A,
• requirement 3:
• the resin A has a repeating unit having a sultone group or a carbonate group, and a content of the repeating unit having a sultone group or a carbonate group is 10% by mole or more with respect to all the repeating units in the resin A,
• requirement 4:
• the resin A has a repeating unit having a carboxyl group, and a content of the repeating unit having a carboxyl group is 10% by mole or more with respect to all the repeating units in the resin A,
• requirement 5:
• the resin A has a repeating unit having a fluorine atom or an iodine atom, and a content of the repeating unit having a fluorine atom or an iodine atom is 10% by mole or more with respect to all the repeating units in the resin A.