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US 12,761,547 B2Granted
Pellicle for EUV lithography masks and methods of manufacturing thereof
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsPei-Cheng Hsu, Wei-Hao Lee, Huan-Ling Lee, Hsin-Chang Lee, Chin-Hsiang Lin
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Abstract
A pellicle for an extreme ultraviolet (EUV) photomask includes a pellicle frame and a main membrane attached to the pellicle frame. The main membrane includes a plurality of nanotubes, and each of the plurality of nanotubes is covered by a coating layer containing Si and one or more metal elements.
Claims20
A pellicle for an extreme ultraviolet (EUV) reflective mask, comprising:
- a pellicle frame;
- and
- a main membrane attached to the pellicle frame, wherein:
- the main membrane includes a plurality of nanotubes,
- each of the plurality of nanotubes is covered by a first coating layer containing a transition metal silicide and a second coating layer disposed over the first coating layer, and
- the second coating layer includes one of AlN, TiN or SiC.
3 more elements
A pellicle for an extreme ultraviolet (EUV) reflective mask, comprising:
- a pellicle frame;
- and
- a main membrane attached to the pellicle frame, wherein:
- the main membrane includes a plurality of nanotubes, and
- each of the plurality of nanotubes is covered by a first coating layer made of a transition metal silicide or a transition metal silicide-nitride and a second coating layer disposed over the first coating layer.
2 more elements
A method of manufacturing a semiconductor device, comprising:
- forming a photo resist layer over a target layer;
- exposing the photo resist layer to an EUV radiation reflected by a photo mask with a pellicle;
- and
- developing the exposed photo resist layer to form a resist pattern, wherein
- the pellicle includes:
- a pellicle frame;
- and
- a main membrane attached to the pellicle frame,
- the main membrane includes a plurality of nanotubes, and
- each of the plurality of nanotubes is covered by a first coating layer containing a transition metal silicide or a transition metal silicide-nitride and a second coating layer disposed over the first coating layer.
7 more elements
Dependencies are inferred from the claim text.