Microscope focus control system
AssigneeCairn Research Limited
InventorMartin Thomas
Life of this patent
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AssigneeCairn Research Limited
InventorMartin Thomas
Estimating the term…
There is provided a microscope focus control system including an illumination source (70) and a polarization-sensitive detector (66) positioned to receive a reflected beam (40) from an interface (54) having a reference refractive index and configured to detect polarization components of the reflected beam (40). An elongate aperture (72) is disposed proximal the illumination source (70) to generate a rectangular beam (74) to impinge on the interface (54) and a second aperture (106) is located at a position corresponding to an unfocused region of the reflected beam (40) from the interface (54) so as to direct unfocused reflected light onto the polarization-sensitive detector (66). Changes in polarization components of the reflected beam are used to measure of change in position of the interface (54) relative to the objective (50). The reflected beam (40) is generated by Fresnel reflection.
A microscope focus control system comprising:
Dependencies are inferred from the claim text.