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US 12,761,410 B2Granted
Metallized high-index blaze grating incoupler
AssigneeApplied Materials, Inc.
InventorsJianji Yang, Samarth Bhargava, David Sell
Life of this patent
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Abstract
Certain embodiments described herein provide a waveguide including a plurality of blazed structures. The plurality of blazed structures include a grating material layer with a grating material having a refractive index greater than or equal to 2.0, and a metallic coating formed on a patterned surface of the grating material layer.
Claims18
A waveguide, comprising:
- a plurality of blazed structures disposed along at least one of at an input coupling region or an output coupling region of the waveguide, the plurality of blazed structures comprising:
- a grating material layer comprising a grating material having a refractive index greater than or equal to 2.0;
- and
- a coating deposited directly on a patterned surface of the grating material layer via at least one of a physical vapor deposition (PVD) process, a chemical vapor deposition (CVD) process, a plasma enhanced chemical vapor deposition (PECVD) process, or an atomic layer deposition (ALD) process, wherein:
- the grating material is selected from titanium dioxide, silicon, silicon dioxide, silicon nitride, niobium oxide, or a combination thereof,
- the coating consists of silver, aluminum, or a combination thereof,
- each of the plurality of blazed structures comprises a first blaze angle and a second blaze angle,
- the first blaze angle is between 50 degrees to 80 degrees from perpendicular,
- the second blaze angle is between 0 degrees and 40 degrees from perpendicular,
- a thickness of the coating is between 20 nanometers (nm) and 40 nm,
- a top duty cycle of the plurality of blazed structures ranges from 10% to 20%, and
- a bottom duty cycle of the plurality of blazed structures ranges from 60% and 80%.
9 more elements
A method of forming a waveguide, comprising:
- forming a plurality of blazed structures along at least one of at an input coupling region or an output coupling region of the waveguide, comprising:
- depositing a layer of a grating material having a refractive index greater than or equal to 2.0;
- patterning the layer of the grating material to form a patterned surface;
- and
- depositing a metallic coating consisting of a metal directly on the patterned surface via at least one of a physical vapor deposition (PVD) process, a chemical vapor deposition (CVD) process, a plasma enhanced chemical vapor deposition (PECVD) process, or an atomic layer deposition (ALD) process, wherein:
- the grating material is selected from titanium dioxide, silicon, silicon dioxide, silicon nitride, niobium oxide, or a combination thereof,
- the metallic coating consists of silver, aluminum, or a combination thereof,
- each of the plurality of blazed structures comprises a first blaze angle and a second blaze angle,
- the first blaze angle is between 50 degrees to 80 degrees from perpendicular,
- the second blaze angle is between 0 degrees and 40 degrees from perpendicular,
- a thickness of the coating is between 20 nanometers (nm) and 40 nm,
- a top duty cycle of the plurality of blazed structures ranges from 10% to 20%, and
- a bottom duty cycle of the plurality of blazed structures ranges from 60% and 80%.
10 more elements
Dependencies are inferred from the claim text.