US 12,761,308 B2 · Multiple-range calibration for per-pin parametric measurement unit

Abstract

A test equipment system can provide signals to, or receive signals from, a device under test (DUT). The test system can include an output stage with output buffer circuitry that can be locally or externally controlled. An external controller can be used to provide precision input signals and, in response, measure current at a DUT interface node of the system, or measure voltage characteristics of various components inside the system. Using the input signals from the external controller, one or more aspects of the test system can be calibrated. For example, resistances of sense resistors in the output stage can be calibrated using current signals received from the external controller. In another example, buffer offset characteristics can be determined using signals from the external controller to control local drive circuitry of the system.

Claims22

Dependent claims

A test equipment system for providing signals to, or receiving signals from, a device under test (DUT), the system comprising:

output buffer circuitry configured to provide a DUT signal to the DUT at a DUT interface node in response to a force control signal at a buffer control node;
a first sense resistor coupled to the DUT interface node and the output buffer circuitry;
a first range switch coupled to the first sense resistor and an auxiliary driver input node;
controller circuitry configured to provide the force control signal at the buffer control node;
and
an auxiliary control circuit configured to bypass the controller circuitry and selectively provide an auxiliary control signal at one of the buffer control node and the auxiliary driver input node.

3 more elements

A system for providing signals to, or receiving signals from, a device under test (DUT) at a DUT node, the system comprising:

a first integrated circuit (IC) comprising a portion of a first semiconductor die of a first semiconductor type, the first IC comprising:
a local controller configured to generate a local force control signal for a force-sense test system;
and
a bypass circuit configured to provide a buffer control signal to an output buffer circuit based on the local force control signal from the local controller or on an auxiliary control signal from an external auxiliary controller for the same force-sense test system;
and
a second IC comprising a portion of a second semiconductor die of a second semiconductor type, the second IC comprising:
the output buffer circuit;
a first sense resistor coupled to a first buffer and the DUT node;
and
a first range switch coupled to the first sense resistor and an auxiliary driver input node, wherein the auxiliary driver input node is configured to receive an auxiliary drive signal from the external auxiliary controller.

7 more elements

A method for calibrating an automated test equipment (ATE) system, the method comprising:

using a first current signal from an external auxiliary controller, determining a resistance of a first sense resistor, wherein the first sense resistor is coupled to a device under test (DUT) node of the system;
in response to a first voltage control signal from the external auxiliary controller, using one or more buffers in an output stage of the system to provide an output current at the DUT node via the first sense resistor;
measuring the output current at the DUT node;
and
providing offset information about the one or more buffers in the output stage based on the measured output current.

2 more elements

Dependencies are inferred from the claim text.

Multiple-range calibration for per-pin parametric measurement unit

Life of this patent

Multiple-range calibration for per-pin parametric measurement unit

Life of this patent

Abstract

Claims22