Wafer tester and storage container for wafer tester
AssigneeVuette Pte. Ltd.
InventorsChoon Leong Lou, Ho Yeh Chen, Ban Ban Lim
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Abstract
A wafer tester and a storage container for the wafer tester are provided. The wafer tester includes a chuck, a probe card, a storage container, and a conveying device. The probe card is disposed above the chuck with respect to the chuck. The storage container includes a plurality of drawers, and the plurality of drawers are configured for carrying the test sample or an auxiliary device. The conveying device conveys the test sample or the auxiliary device among the chuck, the storage container, and the wafer cassette.
Claims10
A wafer tester for testing a test sample from a wafer cassette, the wafer tester comprising:
- a chuck;
- a probe card disposed above the chuck with respect to the chuck;
- a storage container including a plurality of drawers, the plurality of drawers being configured for carrying the test sample or an auxiliary device;
- and
- a conveying device configured for conveying the test sample or the auxiliary device among the chuck, the storage container, and the wafer cassette;
- wherein the chuck is configured to carry one of the test sample and the auxiliary device.
Dependencies are inferred from the claim text.