Digital sensor device for detecting analytes in a sample

A sensor for conversion of at least one of chemical and biochemical information from at least one analyte in a sample to an electrical signal, the sensor comprising:

• a test cantilever having a base and a deformable part, with a receptor layer configured for selective uptake of the at least one analyte applied at least atop the deformable part, the test cantilever having a test converter layer that includes a passive test transducer on the base and an active test transducer on the deformable part, and wherein a test function layer is disposed between the test converter layer and the receptor layer;
• and
• a reference cantilever having a base and a deformable part, with a reference layer configured for selective non-uptake of the at least one analyte applied atop the deformable part, the reference cantilever having a reference converter layer that includes a passive reference transducer on the base and an active reference transducer on the deformable part, and wherein a reference function layer is disposed between the reference converter layer and the reference layer,
• wherein at least one of the test function layer and the reference function layer are geometrically structured so as to maximize a deformation in at least one of the active test transducer and the active reference transducer, respectively, that is induced by deformation of the respective deformable part, and
• wherein the test and reference function layers comprise a modulus of elasticity that is smaller than the average modulus of elasticity of the test and reference converter layers, and
• wherein the test and reference function layers further comprise a recess that forms a reduced thickness of the test and reference function layers in a thickness direction thereof and at a site for the at least one of the active test transducer and the active reference transducer.