Excitation device, inspection system, and excitation method
AssigneeNational Institutes for Quantum Science and Technology
InventorsMasaharu Nishikino, Toshiyuki Kitamura
Life of this patent
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Abstract
In a technique to vibrate a target using a laser induced plasma shock wave, in order to enhance efficiency of vibrating a target as compared with a conventional technique, a vibration device includes a condenser lens, and a shock tube in which a first end of an internal space is sealed by the condenser lens and a second end of the internal space is opened. The condenser lens condenses supplied laser light in the internal space of the shock tube. The shock tube outputs the laser induced plasma shock wave from the second end.
Claims5
A vibration device, comprising:
- a condenser lens;
- and
- a shock tube in which a first end of an internal space is sealed by the condenser lens and a second end of the internal space is opened, laser light being supplied to the shock tube via the condenser lens, and a laser induced plasma shock wave being output from the second end;
- wherein the shock tube includes a main tube having a cylindrical shape;
- wherein the main tube has an end corresponding to the second end of the internal space;
- wherein the condenser lens condenses the laser light in an internal space of the main tube.
A vibration method for generating a laser induced plasma shock wave with use of a shock tube in which a first end of an internal space is sealed by a condenser lens and a second end of the internal space is opened, the shock tube including a main tube having a cylindrical shape;
- the main tube having an end corresponding to the second end of the internal space;
- said vibration method comprising:
- a first step of emitting laser light toward the condenser lens;
- a second step of condensing the laser light in an internal space of the main tube to generate a laser induced plasma shock wave;
- and
- a third step of outputting the laser induced plasma shock wave from the second end.
Dependencies are inferred from the claim text.