Ultrasonic inspection device, ultrasonic inspection method, and program

An ultrasonic inspection method performed by an ultrasonic inspection device including:

• an ultrasonic probe configured to generate an ultrasonic wave, transmit the ultrasonic wave to an inspection object, and receive a reflected wave from the inspection object;
• and
• a controller,
• the ultrasonic inspection method comprising:
• (A) defining a first gate indicating a time range in which a part of the reflected wave is extracted based on a predetermined condition received from a user;
• (B) defining one or more second gates each indicating a time width smaller than that of the first gate before an end time of the first gate;
• (C) for each of a plurality of measurement points of the inspection object,
• (C1) detecting a lower layer echo or a local peak considered as reflected from an interface of a layer lower than a top surface of the inspection object from the reflected wave corresponding to the measurement point, and
• (C2) adjusting a reception time of the reflected wave based on the lower layer echo or the local peak;
• and
• (D) generating a cross-sectional image of the inspection object based on a reflected wave after time adjustment and the second gate.

One or more non-transitory computer readable storage media storing one or more sequences of instructions which, when executed using one or more processors of an ultrasonic inspection system, cause the one or more processors to execute:

• (A) defining a first gate indicating a time range in which a part of a reflected wave is extracted based on a predetermined condition received from a user;
• (B) defining one or more second gates each indicating a time width smaller than that of the first gate before an end time of the first gate;
• (C) for each of a plurality of measurement points of the inspection object,
• (C1) detecting a lower layer echo or a local peak considered as reflected from an interface of a layer lower than a top surface of the inspection object from the reflected wave corresponding to the measurement point, and
• (C2) adjusting a reception time of the reflected wave based on the lower layer echo or the local peak;
• and
• (D) generating a cross-sectional image of the inspection object based on a reflected wave after time adjustment and the second gate.