Method and device for measuring interfaces of an optical element
AssigneeFogale Nanotech
InventorsEric Legros, Sylvain Petitgrand
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AssigneeFogale Nanotech
InventorsEric Legros, Sylvain Petitgrand
Estimating the term…
A method for measuring an item of geometric information of an interface of an optical element including interfaces, with a device configured to direct a measurement beam towards the optical element so as to pass through at least one of the interfaces and be reflected by the interface and generate a reflected beam, to selectively detect an interference signal between the reflected beam and a reference beam, the method including positioning a coherence area at an interface; measuring the interface so as to produce interference signals; and processing the signals including constructing a mathematical interface based on a sub-set of interference signals, determining, based on the mathematical interface and an expected shape of the interface, an item of geometric information of the interface.
A measurement method, for measuring an item of geometric information of an interface to be measured of an optical element comprising at least two interfaces, the method being implemented by a measurement device comprising interferometric measurement means with at least one optical sensor and a low-coherence source, configured to direct a measurement beam towards the optical element so as to pass through at least one of the at least two interfaces, and to be reflected by the interface to be measured and generate a reflected measurement beam, and to selectively detect an interference signal resulting from interferences between the reflected measurement beam and a reference beam, the device also comprising positioning means and digital processing means,
A measurement device, for measuring an item of geometric information of an interface to be measured of an optical element comprising at least two interfaces, the device comprising:
Dependencies are inferred from the claim text.