Film chamber comprising a carrier gas supply, and method for leak testing
AssigneeInficon GmbH
InventorsDaniel Wetzig, Maximilian Reismann, Josef Grenz, Hendrik Van Triest
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AssigneeInficon GmbH
InventorsDaniel Wetzig, Maximilian Reismann, Josef Grenz, Hendrik Van Triest
Estimating the term…
The invention relates to a film chamber (10) for testing the sealing tightness of a test specimen containing a test fluid, the film chamber comprising: at least one vacuum connection (20) which can be connected to a vacuum pump (32) and a gas detector (36); at least one flexible wall region (14) that defines a film chamber volume; and a frame (12) that surrounds the flexible wall region (14) on the outside in order to seal the film chamber volume. The film chamber is characterized in that: the vacuum connection (20) is located in a region arranged centrally with respect to the frame (12) and is radially outwardly surrounded by the frame (12); and at least one gas inlet (22, 30) for supplying a carrier gas is located in the region of the outer frame in such a way that the carrier gas flows through the gas inlet through the film chamber volume along the flexible wall region (14) radially from the outside inwardly to the vacuum connection (20).
A film chamber for leak testing a test specimen containing a test fluid, wherein the film chamber comprises:
Dependencies are inferred from the claim text.