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US 12,761,081 B2Granted
Multilayer body, electronic device, and method of producing multilayer body
AssigneePanasonic Intellectual Property Management Co., Ltd.
InventorsKosei Ohura, Naoki Tambo, Kouhei Takahashi, Masaki Fujikane, Hiroyuki Tanaka
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Abstract
A multilayer body of the present disclosure includes a phononic crystal layer and a metal layer. The phononic crystal layer has a plurality of recesses. The metal layer is disposed on or above the phononic crystal layer. Metal atoms of a kind identical to that of metal atoms contained in the metal layer are present inside the recesses.
Claims10
A multilayer body comprising:
- a phononic crystal layer having a plurality of recesses;
- and
- a metal layer disposed on or above the phononic crystal layer, wherein
- metal atoms of a kind identical to that of metal atoms contained in the metal layer are present inside the recesses, and
- a relationship between a concentration of the metal atoms in the phononic crystal layer and a depth from a surface of the phononic crystal layer satisfies
- y≥100 exp (−0.2326x) in a range of 0≤x≤24,
- where x represents a depth, in nanometers, from the surface of the phononic crystal layer, and y represents a percentage value representing a ratio of a concentration of the metal atoms at a depth of x nanometers in the phononic crystal layer relative to a concentration of the metal atoms at the surface of the phononic crystal layer.
4 more elements
Dependencies are inferred from the claim text.