Valve module for vacuum pump

A valve module comprising a through-body (11) mounted on a communication-hole (113) of a pad (120) of a vacuum pump, and a valve (13) disposed in the body (11) to open and close a central passage (12),

• wherein the body (11) is made of an elastically deformable material and comprises an annular mounting-groove (14) defined along an outer circumferential surface thereof, and an expandable space part (15) defined in a portion of the passage (12) to enable the valve (13) to be movable within a certain range,
• the valve (13) is an up/down valve configured to open and close the passage (12) of the body (11) while moving vertically within the range of the space part (15) by an exhaust pressure, and
• the exhaust pass (17) of the pad (120) comprises:
• one or more longitudinal air guide-grooves (18), which are defined in an inner wall (15a) or an outer wall (13a) and are disposed between the inner wall (15a) of the space part (15) and the outer wall (13a) of the valve (13) to serve as an air passage connected to the passage (12);
• and
• a gap or micro-hole (20) defined between the valve (13) and the body (11) to communicate with the guide-groove (18) and the central passage (12).