# US 12,760,747 B2 · Vacuum pump

> Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt

- Number: US 12,760,747 B2
- Document ID: US12760747B2
- Status: Granted
- Kind: B2
- Application number: 18/546,373
- Filed: 2022-02-25
- Published: 2024-04-11
- Granted: 2026-10-13
- Earliest claimed: 2021-03-04
- Assignees: Edwards Japan Limited
- Applicants: Edwards Japan Limited
- Inventors: Haruki Suzuki
- Web page: https://patentgrep.com/patent/US12760747B2

## CPC

- F04D 29/522: {especially adapted for elastic fluid pumps}
- F04D 19/04: specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D 29/584: {cooling or heating the machine (F04D29/5846, F04D29/5853 take precedence)}
- F04D 29/5853: {heat insulation or conduction}
- F05D 2260/607: Preventing clogging or obstruction of flow paths by dirt, dust, or foreign particles
- F04D: NON-POSITIVE-DISPLACEMENT PUMPS (engine fuel-injection pumps F02M; ion pumps H01J41/12; electrodynamic pumps H02K44/02)
- F05D: INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS

## Abstract

A vacuum pump that limits accumulation of deposits while providing a satisfactory permissible flow rate is obtained. The vacuum pump includes a rotor, a plurality of stator portions that are disposed facing the rotor and have a gas compression function, and a reference member 301 that is one of members stacked toward an inlet port 101 from a base portion 129 and serves as a reference in an axial direction for the plurality of stator portions. The plurality of stator portions are disposed downstream of the reference member 301 (the side corresponding to the outlet port 133).

## Claims

### Claim 1

A vacuum pump comprising:
a casing including an inlet port;
a base portion;
a rotor rotationally held in the casing;
a plurality of stator portions that are disposed facing the rotor and have a gas compression function; and
an annular body that is one of members stacked toward the inlet port from the base portion, the annular body being for positioning the plurality of stator portions as a reference in an axial direction for the plurality of stator portions, wherein
the plurality of stator portions include a plurality of stator blades of a turbomolecular pump portion, a plurality of stator blade spacers of the turbomolecular pump portion, and one threaded spacer of a threaded spacer pump portion,
an entirety of the one threaded spacer is disposed on a downstream side with respect to the annular body,
the annular body has a cooling pipe, and one stator portion of the plurality of stator portions that is positioned on the downstream side has a heater, and
the entirety of the annular body is disposed on a side of the inlet port that is upstream relative to the stator blade positioned furthest downstream among the plurality of stator blades.

### Claim 2 (depends on 1)

The vacuum pump according to claim 1, further comprising a gap between the one stator portion of the plurality of stator portions and the base portion.

### Claim 3 (depends on 2)

The vacuum pump according to claim 2, further comprising a heat insulator in the gap.

### Claim 4 (depends on 3)

The vacuum pump according to claim 3, wherein the heat insulator is in contact with an inner wall surface of the one stator portion of the plurality of stator portions to position the one stator portion in a radial direction.

### Claim 5 (depends on 1)

The vacuum pump according to claim 1, wherein the plurality of stator portions are fixed to the annular body using a plurality of bolts.

### Claim 6 (depends on 2)

The vacuum pump according to claim 2, further comprising an elastic member in the gap.

### Claim 7 (depends on 6)

The vacuum pump according to claim 6, wherein the elastic member is an O-ring.

### Claim 8 (depends on 1)

The vacuum pump according to claim 1, further comprising a bolt that is fixed to the base portion and presses the one stator portion of the plurality of stator portions toward the annular body.

### Claim 9 (depends on 1)

The vacuum pump according to claim 1, further comprising:
an outer cylinder member connected to the base portion, wherein the annular body is connected to the outer cylinder member, and at least one of the annular body and the outer cylinder member is temperature controlled.

### Claim 10 (depends on 1)

The vacuum pump according to claim 1, wherein heat flows into the annular body from the plurality of stator portions.

### Claim 11 (depends on 1)

The vacuum pump according to claim 1, wherein an axial gap is provided between the stator portion having the heater and the base portion.