Vacuum pump and insulation member for use in vacuum pump
AssigneeEdwards Japan Limited
InventorTakashi Kabasawa
Life of this patent
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Abstract
A vacuum pump and a heat insulating member for the vacuum pump are provided that improve the rigidity and heat insulating effect of a heat insulating portion and facilitate the control of intended temperatures of components within the pump. A turbomolecular pump having at least a cooling function includes a heat insulator that is disposed on a threaded spacer and has a hollow structure including cavities extending in the axial direction.
Claims7
A vacuum pump having at least one of a heating function and a cooling function, the vacuum pump comprising:
- a base forming a base section of the vacuum pump;
- a thread groove pump mechanism including a threaded spacer;
- a temperature-controlled component including the base or the thread groove pump mechanism
- a heat insulating portion that is disposed in an axial direction between the thread groove pump mechanism and the base and has a hollow structure including cavities extending in the axial direction or a radial direction, wherein
- the heat insulating portion includes:
- an upper end surface which is in contact with a lower end surface of the thread groove pump mechanism;
- and a lower end surface which is in contact with an upper surface of the base, and the heat insulating portion is sandwiched between the lower end surface of the thread groove pump mechanism and the upper surface of the base,
- the hollow structure of the heat insulating portion includes a plurality of layers in the radial direction, and
- in at least one of the plurality of layers, the cavities each have a substantially parallelogram shape as viewed from a direction of an opening.
A heat insulating member for a vacuum pump, the vacuum pump having at least one of a heating function and a cooling function, the vacuum pump comprising a base forming a base section of the vacuum pump, a thread groove pump mechanism including a threaded spacer, and a temperature-controlled component including at the base or the thread groove pump mechanism, wherein the heat insulating member is configured to be disposed in an axial direction between the thread groove pump and the base and has a hollow structure including cavities extending in the axial direction or a radial direction, wherein
- the heat insulating portion includes:
- an upper end surface which is in contact with a lower end surface of the thread groove pump mechanism;
- and a lower end surface which is in contact with an upper surface of the base, and the heat insulating portion is sandwiched between the lower end surface of the thread groove pump mechanism and the upper surface of the base,
- the hollow structure of the heat insulating portion includes a plurality of layers in the radial direction, and
- in at least one of the plurality of layers, the cavities each have a substantially parallelogram shape as viewed from a direction of an opening.
Dependencies are inferred from the claim text.