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US 12,760,731 B2Granted
Vacuum pump
AssigneePfeiffer Vacuum GmbH
InventorsÉric Mandallaz, Patrick Philippe
Life of this patent
Estimating the term…
Abstract
A dry vacuum pump includes at least one purge duct having two channels which are provided in the thickness of an interstage transverse half-wall of a half-shell. Each channel opens from a front face of the interstage transverse half-wall via a respective opening into the interior space of a pumping stage. A transverse groove is provided in the interstage transverse half-wall at a joining surface of the half-shells. The channels are made up of tubular ducts which are formed between an inclined plane of the transverse groove and the front face.
Claims13
A dry vacuum pump comprising:
- a stator including at least a first half-shell and a second half-shell which are complementary and joined together to form at least two pump stages, the at least two pump stages arranged in series and separated from each other in an axial direction by a respective inter-stage transverse wall of the half-shells;
- two shafts of two rotors extending in the axial direction, configured to rotate in the at least two pump stages;
- at least one purge duct including:
- two channels provided in a thickness of an inter-stage transverse half-wall one of the first half-shell and the second half-shell, each channel of the two channels discharging from a front face of the inter-stage transverse half-wall via a respective orifice into a space inside a pumping stage of the at least two pump stages, and
- a transverse groove provided in the inter-stage transverse half-wall at a joining surface of the half-shells, the channels being formed by tubular ducts formed between an inclined plane of the transverse groove and the front face.
2 more elements
Dependencies are inferred from the claim text.