Methods of forming a metal carbide or a metal carbide material, methods of forming an electronic device, and related electronic devices and systems
AssigneeMicron Technology, Inc.
InventorJean-Sebastien M. Lehn
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Abstract
Methods of forming a metal carbide or a metal carbide material. The method includes reacting a metal precursor with a base material to form a metal on the base material. The metal precursor comprises the chemical formula MXn, where M is a metal, X is a leaving group, and n is an oxidation state of the metal. A carbon-containing precursor comprising at least one alkyne group or an organometallic alkene is reacted with the metal to form carbon on the metal. The metal and the carbon are reacted to form a metal carbide or a metal carbide material on the base material by ALD. Methods of forming an electronic device and related electronic devices and electronic system are also disclosed.
Claims12
A method of forming a metal carbide or a metal carbide material, the method comprising:
- reacting a metal precursor with a base material to form a metal on the base material, the metal precursor comprising the chemical formula MXn, where M is a metal, X is a leaving group, and n is an oxidation state of the metal;
- reacting a carbon-containing precursor comprising at least one alkyne group or at least one organometallic alkene with the metal to form carbon on the metal;
- reacting the metal and the carbon to form a metal carbide or a metal carbide material on the base material by ALD;
- and
- disposing an electrophilic precursor on the metal carbide or the metal carbide material to form a final metal carbide material comprising one or more metal carbides dispersed in a carbon-rich matrix, the electrophilic precursor comprising a carbon halide, a perhalogenated alkane, a perhalogenated alkene, a perhalogenated aromatic, a Group (V) halide, or a combination thereof.
Dependencies are inferred from the claim text.