# US 12,760,403 B2 · Deposition device > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 12,760,403 B2 - Document ID: US12760403B2 - Status: Granted - Kind: B2 - Application number: 18/468,863 - Filed: 2023-09-18 - Published: 2024-03-21 - Granted: 2026-10-13 - Earliest claimed: 2022-09-19 - Assignees: Samsung Display Co., Ltd. - Applicants: Samsung Display Co., LTD. - Inventors: Jung Hyun Ahn; Jaesuk Moon; Seung Jin Lee - Web page: https://patentgrep.com/patent/US12760403B2 ## CPC - C23C 14/042: {using masks} - C23C 14/12: Organic material - C23C 14/50: Substrate holders - H10K 71/166: {using selective deposition, e.g. using a mask} - C23C: COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL (making metal-coated products by extrusion B21C23/22; covering with metal by connecting pre-existing layers to articles, see the relevant places, e.g. B21D39/00, B23K; metallising of glass C03C; metallising mortars, concrete, artificial stone, ceramics or natural stone C04B41/00; enamelling of, or applying a vitreous layer to, metals C23D; treating metal surfaces or coating of metals by electrolysis or electrophoresis C25D; single-crystal film growth C30B; by metallising textiles D06M11/83; decorating textiles by locally metallising D06Q1/04) - H10K: ORGANIC ELECTRIC SOLID-STATE DEVICES ## Abstract An embodiment provides a deposition device including a magnet part that includes magnets; and a substrate support that faces the magnet part and that supports a substrate, the substrate support includes a support plate and patterns formed on a first surface of the support plate, and each of the patterns corresponds to a space between neighboring magnets among the magnets or corresponds to the magnets. ## Claims ### Claim 1 A deposition device comprising: a magnet part that includes magnets; and a substrate support that faces the magnet part and that supports a substrate, wherein the substrate support includes a support plate having a first surface facing the magnet part, and magnetic patterns formed on a second surface of the support plate, the support plate being interposed between the magnet part and the magnetic patterns, and each of the patterns corresponds to a space between neighboring magnets among the magnets or corresponds to the magnets. ### Claim 2 (depends on 1) The deposition device of claim 1, wherein the magnets are disposed in a first direction, and the patterns are disposed in the first direction. ### Claim 3 (depends on 2) The deposition device of claim 2, wherein the magnet part extends in a second direction that is perpendicular to the first direction, and the patterns extend in the second direction. ### Claim 4 (depends on 2) The deposition device of claim 2, wherein a center of each of the patterns is aligned with a center of a space between neighboring ones of the magnets. ### Claim 5 (depends on 2) The deposition device of claim 2, wherein a center of each of the patterns is aligned with a center of a corresponding one of the magnets. ### Claim 6 (depends on 2) The deposition device of claim 2, wherein a thickness of the patterns in a third direction is less than a thickness of the support plate in the third direction, a second direction is perpendicular to the first direction, and the third direction is perpendicular to the first direction and the second direction. ### Claim 7 (depends on 6) The deposition device of claim 6, wherein the substrate support includes protrusions facing the substrate, the patterns are disposed between adjacent protrusions, and a thickness of the patterns in the third direction is less than a thickness of the protrusions in the third direction. ### Claim 8 (depends on 2) The deposition device of claim 2, wherein the substrate support is disposed between the magnet part and the substrate. ### Claim 9 (depends on 2) The deposition device of claim 2, wherein a pitch of the magnets in the first direction is substantially equal to a pitch of the patterns in the first direction. ### Claim 10 (depends on 1) The deposition device of claim 1, further comprising: a deposition mask disposed below the substrate, wherein the substrate support is disposed between the magnet part and the deposition mask. ### Claim 11 (depends on 1) The deposition device of claim 1, wherein the support plate includes a non-magnetic material. ### Claim 12 (depends on 1) The deposition device of claim 1, wherein the support plate includes a refrigerant. ### Claim 13 A deposition device comprising: a magnet part that includes magnets disposed in a first direction; and a substrate support, wherein the substrate support includes: a support plate that has a first surface facing the magnet part and a second surface opposite to the first surface; and magnetic patterns formed on the second surface and arranged in the first direction, and the support plate is interposed between the magnet part and the magnetic patterns. ### Claim 14 (depends on 13) The deposition device of claim 13, wherein the magnet part extends in a second direction that is perpendicular to the first direction, and the patterns extend in the second direction. ### Claim 15 (depends on 13) The deposition device of claim 13, wherein a center of each of the patterns is aligned with a center of a space between neighboring ones of the magnets or a center of each of the magnets. ### Claim 16 (depends on 13) The deposition device of claim 13, wherein the patterns include a magnetic material. ### Claim 17 (depends on 13) The deposition device of claim 13, wherein a substrate is disposed at a side of the second surface of the substrate support, and the substrate support is disposed between the magnet part and the substrate.