Process for purification of helium to very high purity

Abstract

A process for purifying a helium containing stream, including introducing a feed gas stream into a first membrane separation unit, thereby producing a first permeate stream, and a first residue stream. Introducing the first permeate stream into a first dehydrogenation unit, thereby producing a first dehydrogenated gas stream. Introducing the first dehydrogenated gas stream into a second membrane separation unit, thereby producing a second permeate stream, and a second residue stream. Introducing the second permeate stream into a second dehydrogenation unit, thereby producing a second dehydrogenated gas stream. And introducing the second dehydrogenated gas stream into a helium pressure swing adsorption unit, thereby producing a product helium stream, and a helium-lean stream. Wherein the product helium stream contains more than 99.9% mol helium, and less than 0.1% mol hydrogen.

Dependencies are inferred from the claim text.