MEMS microphone
AssigneeAac Acoustic Technologies (Shenzhen) Co., Ltd.
InventorsZhuanzhuan Zhao, Kaijie Wang, Rui Zhang
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Abstract
A MEMS microphone, includes a substrate with a back cavity, and a capacitive system including a back plate and a diaphragm located on the substrate, the back plate includes a body portion and a first protrusion, the diaphragm includes a main portion and a second protrusion, the first protrusion is corresponding to the second protrusion, the substrate includes an upper end close to the capacitive system and a lower end away from the capacitive system, an opening of the back cavity at the upper end of the substrate is larger than an opening at the lower end of the substrate. Compared with the related art, the MEMS microphone disclosed by the present disclosure could improve the resonant frequency.
Claims9
A MEMS microphone, comprising:
- a substrate with a back cavity, and
- a capacitive system located on the substrate, comprising a back plate and a diaphragm opposite to the back plate, a gap formed between the back plate and the diaphragm, wherein
- the back plate comprises a body portion and a first protrusion extending from the body portion in a direction away from the substrate, the diaphragm comprises a main portion and a second protrusion extending from the main portion in the direction away from the substrate, the first protrusion comprises a first upper surface away from the substrate and a first lower surface close to the substrate, the body portion comprises a second upper surface away from the substrate and a second lower surface close to the substrate, the first upper surface of the first protrusion is disposed further from the substrate than the second upper surface of the body portion, and the first lower surface of the first protrusion is disposed further from the substrate than the second lower surface of the body portion, such that the first protrusion and the body portion jointly define a groove facing the second protrusion, the first protrusion and the second protrusion are aligned along a vibration direction of the diaphragm, the substrate comprises an upper end close to the capacitive system and a lower end away from the capacitive system, an opening of the back cavity at the upper end of the substrate is larger than an opening at the lower end of the substrate.
Dependencies are inferred from the claim text.