Information processing device, imprinting device, storage medium, and article manufacturing method
AssigneeCanon Kabushiki Kaisha
InventorRyohei Suzuki
Life of this patent
Estimating the term…
Abstract
To provide an information processing device, or the like that can reduce cost and time required for adjusting a profile of imprinting of an imprinting device, the information processing device for performing simulation of the imprinting with the imprinting device includes a curvature acquisition unit that acquires a change of a curvature of a pattern part in a vicinity of an outer circumference of a contact surface when the pattern part is brought in contact with an imprinting material in the imprinting, and a profile adjustment unit that adjusts a profile of the imprinting of the pattern part such that the curvature does not fall below a predetermined threshold.
Claims15
An information processing device that performs simulation of imprinting with an imprinting device, the information processing device comprising:
- at least one processor or circuit configured to function as
- a curvature acquisition unit configured to acquire a change of a curvature of a pattern part in a vicinity of an outer circumference of a contact surface between the pattern part and an imprinting material when the pattern part is brought in contact with the imprinting material in the imprinting;
- and
- a profile adjustment unit configured to adjust a profile of the imprinting of the pattern part such that the curvature does not fall below a predetermined threshold.
An imprinting device that imprints a pattern of a pattern part on an imprinting material, the imprinting device comprising:
- at least one processor or circuit configured to function as
- a curvature acquisition unit configured to acquire a change of a curvature of a pattern part in a vicinity of an outer circumference of a contact surface between the pattern part and an imprinting material when the pattern part is brought in contact with the imprinting material in the imprinting;
- a profile adjustment unit configured to adjust a profile of the imprinting of the pattern part such that the curvature does not fall below a predetermined threshold;
- and
- a control unit configured to imprint the pattern of the pattern part onto the imprinting material using the profile.
A non-transitory computer-readable storage medium configured to store a computer program to control an information processing device for performing simulation of imprinting with an imprinting device,
- wherein the computer program comprises instructions for executing following processes:
- a curvature acquisition step of acquiring a change of a curvature of a pattern part in a vicinity of an outer circumference of a contact surface between the pattern part and an imprinting material when the pattern part is brought in contact with the imprinting material in the imprinting;
- and
- a profile adjustment step of adjusting a profile of the imprinting of the pattern part such that the curvature does not fall below a predetermined threshold.
An article manufacturing method using an imprinting device, the method comprising:
- a curvature acquisition step of acquiring a change of a curvature of a pattern part in a vicinity of an outer circumference of a contact surface between the pattern part and an imprinting material when the pattern part is brought in contact with the imprinting material in the imprinting by the imprinting device;
- a profile adjustment step of adjusting a profile of the imprinting of the pattern part such that the curvature does not fall below a predetermined threshold;
- a pattern formation step of forming the pattern on the imprinting material by using the imprinting device;
- and
- a step of developing a substrate on which the pattern is formed in the pattern formation step.
Dependencies are inferred from the claim text.