Measurement device, robot system, management method, target member, and measurement method
AssigneeNikon Corporation
InventorTomoki Miyakawa
Life of this patent
Estimating the term…
Abstract
A measurement device for a movable robot determines the robot's position along three axes and its rotation around these axes. The device includes an emission unit that emits measurement light to at least three reflective elements attached to the robot, a light receiving unit that captures the reflected light, and a position acquiring unit. The position acquiring unit gathers position information related to the robot's first, second, and third axes, as well as rotational position data around each of these axes, based on the received light reflections.
Claims22
A measurement device measuring a position of a movable robot and a position of the robot in a rotation direction, the measurement device comprising:
- a light source configured to emit measurement light to each of at least three reflective elements attached to the robot;
- a photodetector configured to receive reflection light reflected on each of the three reflective elements;
- and
- circuitry configured to acquire position information relating to a first axis of the robot, position information relating to a second axis intersecting with the first axis, and position information relating to a third axis intersecting with the first axis and second axis and information relating to a position in a rotation direction around the first axis, information relating to a position in a rotation direction around the second axis, and information relating to a position in a rotation direction around the third axis on the basis of light reception results acquired by the photodetector.
A target member comprising a first reflective element, a second reflective element, and a third reflective element to which measurement light is emitted for acquiring position information relating to a first axis, position information relating to a second axis intersecting with the first axis, and position information relating to a third axis intersecting with the first axis and second axis, and information relating to a position in a rotation direction around the first axis, information relating to a position in a rotation direction around the second axis, and information relating to a position in a rotation direction around the third axis for a movable measurement target,
- wherein the target member is configured to be attached to the movable measurement target, and
- wherein a first side joining a first position at which the first reflective element is disposed and a second position at which the second reflective element is disposed, a second side joining the second position and a third position at which the third reflective element is disposed, and a third side joining the third position and the first position have mutually-different lengths.
A measurement method measuring a position of a movable robot and a position of the robot in a rotation direction, the measurement method comprising:
- emitting measurement light to each of at least three reflective elements attached to the robot;
- receiving reflection light reflected on each of the three reflective elements;
- and
- acquiring, by circuitry, position information relating to a first axis of the robot, position information relating to a second axis intersecting with the first axis, and position information relating to a third axis intersecting with the first axis and second axis and information relating to a position in a rotation direction around the first axis, information relating to a position in a rotation direction around the second axis, and information relating to a position in a rotation direction around the third axis on the basis of light reception results acquired by the receiving of light.
Dependencies are inferred from the claim text.