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US 12,759,157 B2Granted
Substrate transfer apparatus and method of calibrating substrate transfer apparatus
AssigneesKawasaki Jukogyo Kabushiki Kaisha, Kawasaki Robotics (USA), Inc.
InventorsShinya Kitano, Weston Wahl, Ming Zeng, Simon Jeyapalan, Iori Kurata
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Abstract
A method of calibrating a substrate transfer apparatus according to one or more embodiments may include: fixing a substrate transfer apparatus; measuring the operation of the fixed substrate transfer apparatus; generating eigendata relating to an operation of the fixed substrate transfer apparatus; and storing the eigendata in the substrate transfer apparatus.
Claims15
A method of calibrating a substrate transfer apparatus comprising:
- fixing the substrate transfer apparatus at a first location;
- measuring an operation of the substrate transfer apparatus fixed at the first location;
- generating eigendata relating to the operation of the substrate transfer apparatus fixed at the first location;
- storing the eigendata relating to the operation of the substrate transfer apparatus fixed at the first location;
- fixing the substrate transfer apparatus at a second location different from the first location;
- and
- performing, using the stored eigendata related to the operation of the substrate transfer apparatus fixed at the first location, calibration on the substrate transfer apparatus that is fixed at the second location.
4 more elements
A substrate transfer apparatus comprises:
- a base;
- an elevator connected to the base, which extends and retracts;
- and
- an end effector comprising a target that reflects light and a memory, and is lifted and lowered with extension and retraction of the elevator, wherein
- the memory stores eigendata related to fixing of the substrate transfer apparatus at a first location at a time of testing and eigendata related to an operation of the substrate transfer apparatus fixed at the first location, wherein at least one of the eigendata related to the fixing of the substrate transfer apparatus at the first location and the eigendata related to the operation of the substrate transfer apparatus fixed at the first location are configured to perform calibration on the substrate transfer apparatus at a second location.
2 more elements
Dependencies are inferred from the claim text.