Cleaning apparatus
AssigneeSamsung Electronics Co., Ltd.
InventorsSeonguk Jeong, Youngshin Choi, Sungchul Kim, Youngsoo Lee
Life of this patent
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Abstract
A cleaning apparatus may include a cleaning chamber, a vacuum generator and an air injection module. The cleaning chamber may be configured to receive a tray, the tray may be configured to receive a plurality of objects. The vacuum generator may be configured to apply vacuum into the cleaning chamber and fix a lower surface of the tray. The air injection module may be configured to inject air to an upper surface of the tray to remove a contaminant from the objects. Thus, the cleaning apparatus may have improved cleaning efficiency without a damage of the object.
Claims18
A cleaning apparatus comprising:
- a cleaning chamber configured to receive a tray, the tray configured to receive a plurality of objects;
- a vacuum generator configured to apply vacuum into the cleaning chamber and fix a lower surface of the tray;
- and
- an air injection module comprising a nozzle block with a plurality of nozzle holes, wherein the nozzle block is configured to rotatably inject air through the plurality of nozzle holes to an upper surface of the tray,
- wherein the air injection module comprises
- a nozzle arranged over the tray and configured to inject air to the upper surface of the tray,
- an air line configured to supply the air to the nozzle,
- a compressor arranged on the air line and configured to provide the air with a pressure, and
- a pulse generator arranged on the air line and configured to provide the air with a pulse, and
- wherein the nozzle comprises
- a spindle,
- the nozzle block rotatably connected to the spindle with respect to a vertical direction;
- a plurality of nozzle bars extending from the nozzle block in a horizontal direction;
- and
- a nozzle head extending from each of the plurality of the nozzle bars toward the tray and including the plurality of nozzle holes configured to inject the air.
A cleaning apparatus comprising:
- a cleaning chamber configured to receive a tray, the tray configured to receive a plurality of semiconductor packages;
- a vacuum generator configured to apply vacuum into the cleaning chamber and fix a lower surface of the tray;
- an air injection module comprising a nozzle block with a plurality of nozzle holes, wherein the nozzle block is configured to rotatably inject air through the plurality of nozzle holes to an upper surface of the tray;
- a mesh cover configured to fix the upper surface of the tray;
- and
- a vibration applier configured to apply a vibration to the tray,
- wherein the air injection module comprises:
- a nozzle arranged over the tray to inject air to the upper surface of the tray;
- an air line configured to supply the air to the nozzle;
- a compressor arranged on the air line and configured to provide the air with a pressure;
- and
- a pulse generator arranged on the air line and configured to provide the air with a pulse,
- wherein the nozzle includes
- a spindle;
- the nozzle block rotatably connected to the spindle with respect to a vertical direction;
- a plurality of nozzle bars extending from the nozzle block in a horizontal direction;
- and
- a nozzle head extending from each of the plurality of the nozzle bars toward the tray and including the plurality of nozzle holes configured to inject the air.
Dependencies are inferred from the claim text.