# US 12,759,018 B2 · Surface modification in the vapor phase

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- Number: US 12,759,018 B2
- Document ID: US12759018B2
- Status: Granted
- Kind: B2
- Application number: 18/333,880
- Filed: 2023-06-13
- Published: 2024-05-16
- Granted: 2026-10-13
- Earliest claimed: 2019-10-11
- Assignees: Quantum-Si Incorporated
- Applicants: Quantum-Si Incorporated
- Inventors: Guojun Chen; Jeremy Lackey
- Web page: https://patentgrep.com/patent/US12759018B2

## CPC

- B05D 1/60: {Deposition of organic layers from vapour phase (vapour phase deposition in general C23C14/00, C23C16/00)}
- B05D 3/104: {Pretreatment of other substrates}
- G01N 33/54306: {Solid-phase reaction mechanisms}
- G01N 33/54366: {Apparatus specially adapted for solid-phase testing}
- B05D 2203/30: Other inorganic substrates, e.g. ceramics, silicon
- B05D 2350/60: Adding a layer before coating
- B05D: PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL (conveying articles or workpieces through baths of liquid B65G, e.g. B65G49/02)
- G01N: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES (measuring or testing apparatus or processes other than immunoassay, involving enzymes or microorganisms C12M, C12Q)

## Abstract

Aspects of the application provide methods of producing substrates having modified surfaces. In some aspects, methods of surface modification involve treating a surface of a substrate with an organic reagent in vapor phase to form an organic layer over the surface. In some aspects, methods of forming a stable surface coating on an oxidized surface are provided.

## Claims

### Claim 1

A method of modifying a surface of a substrate, the method comprising:
a) providing a substrate having a first surface portion and a second surface portion, wherein the substrate comprises a phosphorus-containing layer on the first surface portion, and wherein the first and second surface portions have different surface properties;
b) treating the substrate with a first silane composition in liquid phase, wherein the first silane composition comprises a silane functionalizing agent that comprises a coupling moiety, and wherein the silane functionalizing agent preferentially functionalizes the second surface portion; and
c) following (a) and (b), treating the substrate with a second silane composition in vapor phase, wherein the second silane composition forms a silane coating layer over the first and second surface portions.

### Claim 2 (depends on 1)

The method of claim 1, wherein the first surface portion is a metal or metal oxide surface, and wherein the second surface portion is a transparent or glass surface.

### Claim 3 (depends on 2)

The method of claim 2, wherein the first surface portion is a titanium dioxide surface, and wherein the second surface portion is a silicon dioxide surface.

### Claim 4 (depends on 1)

The method of claim 1, wherein the coupling moiety is a covalent coupling moiety or a non-covalent coupling moiety.

### Claim 5 (depends on 4)

The method of claim 4, wherein the non-covalent coupling moiety comprises a biotin moiety, an avidin protein, a streptavidin protein, a lectin protein, or a SNAP-tag.

### Claim 6 (depends on 1)

The method of claim 1, wherein the silane functionalizing agent comprises a biotin-PEG-silane.

### Claim 7 (depends on 1)

The method of claim 1, wherein the silane functionalizing agent comprises a mono-ethoxysilane, a methoxysilane, a di-ethoxysilane, a trichlorosilane, or a di-ethoxy-methoxysilane.

### Claim 8 (depends on 1)

The method of claim 1, wherein the silane functionalizing agent comprises a biotinylated silane.

### Claim 9 (depends on 1)

The method of claim 1, further comprising:
contacting the substrate with a molecule of interest that binds the coupling moiety, thereby coupling the molecule of interest to the second surface portion.

### Claim 10 (depends on 9)

The method of claim 9, wherein the molecule of interest comprises a biomolecule.

### Claim 11 (depends on 10)

The method of claim 10, wherein the biomolecule is a polypeptide.

### Claim 12 (depends on 11)

The method of claim 11, wherein the polypeptide is a protein or fragment thereof.

### Claim 13 (depends on 11)

The method of claim 11, wherein the polypeptide is a substrate for a polypeptide sequencing reaction.

### Claim 14 (depends on 1)

The method of claim 1, wherein the second silane composition comprises at least one chlorosilane in vapor phase.

### Claim 15 (depends on 1)

The method of claim 1, further comprising, prior to (a) and (b):
treating the substrate with a phosphoryl halide in vapor phase, wherein the phosphoryl halide preferentially forms the phosphorus-containing layer on the first surface portion.

### Claim 16 (depends on 15)

The method of claim 15, wherein the phosphoryl halide is an organic phosphoryl dihalide.

### Claim 17 (depends on 16)

The method of claim 16, wherein the organic phosphoryl dihalide is an organic phosphoryl dichloride.

### Claim 18 (depends on 1)

The method of claim 1, wherein the phosphorus-containing layer is an organophosphorus layer.

### Claim 19 (depends on 18)

The method of claim 18, wherein the organophosphorus layer is an organophosphonate layer.

### Claim 20 (depends on 1)

The method of claim 1, wherein at least a portion of the silane coating layer is formed on the phosphorus-containing layer.

### Claim 21 (depends on 1)

The method of claim 1, wherein at least a portion of the silane coating layer is formed on the functionalized second surface portion.