Pressure sensor module and dispensing device including pressure sensor module

Abstract

A pressure sensor module according to the invention includes, inside a flow channel substrate, a flow channel configured to allow system water to flow therethrough and a branch channel connected to the flow channel, in which a semiconductor element on which a strain detection unit is mounted is joined to the flow channel substrate via a joining layer at an outlet portion of the branch channel so as to close the outlet portion of the branch channel. A moisture prevention film is provided so as to cover a surface of the flow channel substrate in the branch channel, a surface of the joining layer in the branch channel, and a surface of the semiconductor element on a side where the strain detection unit is not mounted.

Dependencies are inferred from the claim text.