US 12,758,907 B2 · Purge port filter support

Abstract

A front opening unified pod includes a housing and a purge port in the housing. The purge port includes a filter membrane and a purge filter support. The purge filter support includes an outer ring structure and a support frame working. The support framework extends from the outer ring structure The outer ring structure includes a plurality of supports that provide a support surface for the filter membrane. One or more of the supports respectively increase in thickness from a thickness for the upper support surface. A purge filter support includes an outer ring structure, and one or more openings, a support framework that extends from the outer ring structure. The support framework includes a supports that provide a support surface configured to contact and support a filter membrane. One or more supports each increase in thickness from a first thickness of the upper support surface.

Claims19

Dependent claims

A purge filter configured to be assembled into a front opening unified pod purge port, the purge filter, comprising:

a filter membrane;
and
a purge filter support comprising:
an outer ring structure contacting a periphery of the filter membrane;
a support framework extending inward from the outer ring structure, the support framework including a plurality of supports providing a lower support surface and an upper support surface, the upper support surface contacting and supporting a central portion of the filter membrane, the plurality of supports including one or more supports each increasing in thickness from a respective first thickness of the upper support surface to a respective second thickness of the lower support surface;
and
one or more openings extending through the support framework between the plurality of supports,
wherein the upper support surface is positioned on a downstream side of the filter membrane along a purge gas flow path through the purge filter, and is arranged to support the central portion of the filter membrane against deflection of the filter membrane in the downstream direction.

5 more elements

A front opening unified pod, comprising:

a housing;
a purge port extending through the housing, the purge port including:
a filter membrane,
a first purge filter support that includes:
an outer ring structure contacting a periphery of the filter membrane;
a support framework extending inward from the outer ring structure, the support framework including a plurality of supports providing a lower support surface and an upper support surface to a respective second thickness of the lower support surface, the plurality of supports including one or more supports each increasing in thickness from a respective first thickness of the upper support surface wherein the upper support surface contacts and supports a filter membrane in a purge port of a front opening unified pod, and
one or more openings extending through the support framework between the plurality of supports, and
a second purge filter support wherein the filter membrane is pinched between the first purge filter support and the second purge filter support,
wherein a flow of purge gas flowing through the purge port is configured to push the filter membrane against the upper support surface of the support framework.

6 more elements

Dependencies are inferred from the claim text.

Purge port filter support

Life of this patent

Purge port filter support

Life of this patent

Abstract

Claims19