Brush cleaning system and brush cleaning method
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsYing-Chuan Su, Hao Yu Wang, Huan-Yung Lin, Shao-Yen Ku
Life of this patent
Estimating the term…
Loading patent…
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsYing-Chuan Su, Hao Yu Wang, Huan-Yung Lin, Shao-Yen Ku
Estimating the term…
A brush wetting and cleaning system or tool including a brush wetting and cleaning housing. A wetting nozzle in fluid communication with a cavity in the brush wetting and cleaning housing. The wetting nozzle is configured to, in operation, wet a brush of a brush head inserted into the cavity of the brush wetting and cleaning housing. A spray nozzle in fluid communication with the cavity in the brush wetting and cleaning housing. The spray nozzle is configured to, in operation, clean the brush of the brush head inserted into the cavity of the brush wetting and cleaning housing. In a method of utilizing the brush wetting and cleaning system or tool, the brush of the brush head is wetted and cleaned between cleaning successive wafers or workpieces.
A system, comprising:
A system, comprising:
A system, comprising:
Dependencies are inferred from the claim text.