Substrate handling apparatus for extreme warped wafers

A substrate handling apparatus comprising:

• a forked structure including a first support portion and a second support portion, wherein the first support portion and the second support portion are arranged to provide access to a back surface of a substrate for placement of the substrate on a support structure, wherein the forked structure includes a first access opening and a second access opening each having a side open to an exterior of the forked structure and each being dimensioned and positioned to permit unobstructed passage of at least one support pin of the support structure through the forked structure to the back surface of the substrate to provide a substrate carried on the forked structure mechanical contact to at least three substrate contact points of the support structure, wherein the first access opening, the second access opening, the first support portion, and the second support portion form a contiguous open region extending continuously between the first and second support portions and between the first and second access openings, such that at least three support pins of the support structure can simultaneously contact the back surface of the substrate through the contiguous open region without interference from the forked structure, wherein the first access opening and the second access opening are each open on a side to connect a space between the first support portion and the second support portion with the first access opening and the second access opening,
• wherein the forked structure includes a curved region positioned between the first access opening and the second access opening, wherein the first access opening is formed between the curved region and the first support portion, and wherein the second access opening is formed between the curved region and the second support portion;
• wherein the curved region is disposed along an arc of a circle with its center being the center of gravity of the substrate to be held on the forked structure;
• and
• a first active support element and a second active support element disposed on the forked structure, the first active support element and the second active support element disposed on the curved region of the forked structure and positioned between the first access opening and the second access opening of the forked structure, the first active support element configured to establish a first, active point of contact on the substrate and the second active support element configured to establish a second, active point of contact on the substrate, wherein the first active support element comprises a first suction element and the second active support element comprises a second suction element, wherein the first suction element and the second suction element are fluidically coupled to a vacuum through a vacuum path of the forked structure;
• and
• one or more passive support elements disposed on the forked structure, wherein at least one passive support element runs along a length of at least one of the first support portion or the second support portion, wherein the first access opening is located between a first pair of passive support elements and the second access opening is located between a second pair of passive support elements, wherein each of the first access opening and the second access opening is located between a respective pair of passive support elements disposed on the corresponding support portion, such that the access openings are flanked by passive support elements and the contiguous open region is bounded by said passive support elements.

A system comprising:

• a chuck;
• and
• a substrate handing device, wherein the substrate handling device comprises:
• a forked structure including a first support portion and a second support portion, wherein the first support portion and the second support portion are arranged to provide access to a back surface of a substrate for placement of the substrate on the chuck, wherein the forked structure includes a first access opening and a second access opening each having a side open to an exterior of the forked structure and each being dimensioned and positioned to permit unobstructed passage of at least one support pin of the support structure through the forked structure to the back surface of the substrate to provide a substrate carried on the forked structure mechanical contact to at least three substrate contact points of the chuck, wherein the first access opening, the second access opening, the first support portion, and the second support portion form a contiguous open region extending continuously between the first and second support portions and between the first and second access openings, such that at least three support pins of the support structure can simultaneously contact the back surface of the substrate through the contiguous open region without interference from the forked structure, wherein the first access opening and the second access opening are each open on a side to connect a space between the first support portion and the second support portion with the first access opening and the second access opening,
• wherein the forked structure includes a curved region positioned between the first access opening and the second access opening, wherein the first access opening is formed between the curved region and the first support portion, and wherein the second access opening is formed between the curved region and the second support portion;
• wherein the curved region is disposed along an arc of a circle with its center being the center of gravity of the substrate to be held on the forked structure;
• and
• a first active support element and a second active support element disposed on the forked structure, the first active support element and the second active support element disposed on the curved region of the forked structure and positioned between the first access opening and the second access opening of the forked structure, the first active support element configured to establish a first, active point of contact on the substrate and the second active support element configured to establish a second, active point of contact on the substrate, wherein the first active support element comprises a first suction element and the second active support element comprises a second suction element, wherein the first suction element and the second suction element are fluidically coupled to a vacuum through a vacuum path of the forked structure;
• and
• one or more passive support elements disposed on the forked structure, wherein at least one passive support element runs along a length of at least one of the first support portion or the second support portion, wherein the first access opening is located between a first pair of passive support elements and the second access opening is located between a second pair of passive support elements, wherein each of the first access opening and the second access opening is located between a respective pair of passive support elements disposed on the corresponding support portion, such that the access openings are flanked by passive support elements and the contiguous open region is bounded by said passive support elements.