Heating/cooling device and heating/cooling method

A heating/cooling device comprising:

• a chamber;
• a plurality of substrate holders provided inside the chamber, wherein each substrate holder is configured to hold a substrate;
• a plurality of LED light sources provided outside the chamber and corresponding to the plurality of substrate holders, respectively, wherein each LED light source is configured to irradiate the substrate held by the substrate holder corresponding thereto with LED light, and the LED light has a wavelength that heats the substrate;
• a plurality of transmission windows provided between the plurality of substrate holders and the plurality of LED light sources, and corresponding to the plurality of LED light sources, respectively, wherein each transmission window is configured to transmit the LED light radiated from the LED light source corresponding thereto;
• a plurality of gas distribution parts provided inside the chamber and corresponding to the plurality of substrate holders, respectively, wherein each gas distribution part is configured to distribute and supply a cooling gas to the substrate held by the corresponding substrate holder;
• a plurality of LED mounting boards corresponding to the plurality of LED light sources, wherein a front surface of each of the LED mounting boards is mounted with the corresponding LED light source;
• a plurality of cooling plates corresponding to the plurality of LED mounting boards, wherein each of the cooling plates is provided on a rear surface of the corresponding LED mounting board and configured to cool the corresponding LED light source;
• and
• an LED control board provided on a side opposite to the LED mounting boards with respect to the cooling plates,
• wherein each of the cooling plates is further configured to cool a component provided on a front surface of the LED control board.