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US 12,757,637 B2Granted
Piezoelectric element
AssigneeSeiko Epson Corporation
InventorsKoji Ohashi, Yasuaki Hamada, Kazuya Kitada, Yoshiki Yano, Tsutomu Asakawa, Masahiro Takeuchi, Yasuhiro Horiba, Yasuhiro Itayama
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Abstract
A piezoelectric element includes an adhesion layer formed at a vibration plate and containing titanium, a lower electrode formed at the adhesion layer, a diffusion reduction layer formed at the lower electrode and containing iridium, a seed layer formed at the diffusion reduction layer and containing bismuth, a piezoelectric layer formed at the seed layer and containing potassium, sodium, and niobium, and an upper electrode formed at the piezoelectric layer.
Claims7
A piezoelectric element comprising:
- an adhesion layer formed at a substrate and containing titanium;
- a lower electrode formed at the adhesion layer;
- a diffusion reduction layer formed at the lower electrode and containing iridium;
- a seed layer formed at the diffusion reduction layer and containing bismuth;
- a piezoelectric layer formed at the seed layer and containing potassium, sodium, and niobium;
- and
- an upper electrode formed at the piezoelectric layer.
4 more elements
Dependencies are inferred from the claim text.