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US 12,757,487 B2Granted
Electronic device and manufacturing method of electronic device
AssigneeInnolux Corporation
InventorsShu-Ling Wu, Chia-Ping Tseng
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Abstract
A manufacturing method of an electronic device is provided, which includes following steps. A substrate is provided. A conductive layer is formed on the substrate. A circuit structure is formed on the conductive layer. The circuit structure is patterned to form at least one opening. The at least one opening has a stepped profile. An electronic device is also provided.
Claims8
A manufacturing method of an electronic device, comprising:
- providing a substrate;
- forming a conductive layer on the substrate;
- forming a circuit structure on the conductive layer;
- and
- patterning the circuit structure to form at least one opening,
- wherein the at least one opening has a stepped profile;
- wherein forming the circuit structure on the conductive layer comprises:
- forming a dielectric layer on the conductive layer, wherein the conductive layer is located between the dielectric layer and the substrate;
- patterning the dielectric layer to form a first sub-opening;
- forming an active component layer on the dielectric layer, wherein the dielectric layer is located between the active component layer and the conductive layer;
- and
- patterning the active component layer and a portion of the dielectric layer to form a second sub-opening,
- wherein the second sub-opening corresponds to the first sub-opening in a top view direction of the substrate to define the at least one opening.
10 more elements
Dependencies are inferred from the claim text.