Integrated circuit structures with cavity spacers

A computing device, comprising:

• a board;
• and
• a component coupled to the board, the component including an integrated circuit structure, comprising:
• a sub-fin structure over a stack of nanowires;
• a gate structure vertically around the stack of nanowires;
• an internal gate spacer between vertically adjacent ones of the nanowires and adjacent to the gate structure;
• a trench contact structure laterally adjacent to a side of the gate structure;
• a cavity spacer laterally between the gate structure and the trench contact structure;
• and
• a dielectric layer sealing the cavity spacer, the dielectric layer extending along less than an entirety of a height of the stack of nanowires.

An integrated circuit structure, comprising:

• a stack of nanowires;
• a gate structure vertically around the stack of nanowires;
• a source or drain structure coupled to an end of the stack of nanowires, the source or drain structure adjacent to a side of the gate structure;
• a plurality of internal cavity spacers between vertically adjacent ones of the nanowires, the plurality of internal cavity spacers laterally between the gate structure and the source or drain structure, each of the internal cavity spacers comprising an air gap;
• and
• a dipole layer lining individual one of the plurality of internal cavity spacers, the dipole layer completely surrounding the air gap of each of the internal cavity spacers.

A computing device, comprising:

• a board;
• and
• a component coupled to the board, the component including an integrated circuit structure, comprising:
• a stack of nanowires;
• a gate structure vertically around the stack of nanowires;
• a source or drain structure coupled to an end of the stack of nanowires, the source or drain structure adjacent to a side of the gate structure;
• a plurality of internal cavity spacers between vertically adjacent ones of the nanowires, the plurality of internal cavity spacers laterally between the gate structure and the source or drain structure, each of the internal cavity spacers comprising an air gap;
• and
• a dipole layer lining individual one of the plurality of internal cavity spacers, the dipole layer completely surrounding the air gap of each of the internal cavity spacers.