Semiconductor device
AssigneeFuji Electric Co., Ltd.
InventorsTohru Shirakawa, Yoshiharu Kato, Yuuki Oda
Life of this patent
Estimating the term…
Loading patent…
AssigneeFuji Electric Co., Ltd.
InventorsTohru Shirakawa, Yoshiharu Kato, Yuuki Oda
Estimating the term…
Provided is a semiconductor device including: a plurality of trench portions, one or more mesa portions which are sandwiched between two trench portions; an upper-surface electrode which does not contain a metal having a higher melting point than a material of the semiconductor substrate; and a barrier metal which contains the metal having the higher melting point than the material of the semiconductor substrate, and including: a first region where the barrier metal is not provided between the trench portion and the upper-surface electrode and where the barrier metal is provided between the mesa portion in contact with the trench portion not provided with the barrier metal and the upper-surface electrode; and a second region where the barrier metal is provided between the trench portion and the upper-surface electrode.
A semiconductor device formed on a semiconductor substrate including an upper surface and a lower surface, the semiconductor device comprising:
Dependencies are inferred from the claim text.