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US 12,756,376 B2Granted
Surface acoustic wave device with acoustic wave energy confinement
AssigneeSkyworks Solutions, Inc.
InventorsTakuya Ushiyama, Stephen Joseph Kovacic, Joshua James Caron, Benjamin Paul Abbott, Hidehito Shimizu, Koichi Hatano
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Abstract
A surface acoustic wave device has a trench formed adjacent to at least one interdigital transducer electrode into the piezoelectric substrate. The trench can be adapted to enhance confinement of acoustic wave energy provided by the interdigital transducer electrode.
Claims19
A surface acoustic wave device comprising:
- a piezoelectric substrate;
- at least one interdigital transducer electrode provided on the piezoelectric substrate;
- and
- a trench formed adjacent to the at least one interdigital transducer electrode into the piezoelectric substrate and adapted to enhance confinement of acoustic wave energy provided by the at least one interdigital transducer electrode, the trench including an edge having a distance to a closest metal electrode finger of the at least one interdigital transducer electrode determined by a wavelength of a surface acoustic wave excited by the at least one interdigital transducer electrode, the distance of the edge of the trench to the closest metal electrode finger adapted to maximize a reflection of a surface acoustic wave excited by the at least one interdigital transducer electrode.
1 more element
An electronic apparatus comprising:
- a surface acoustic wave device including a piezoelectric substrate, at least one interdigital transducer electrode provided on the piezoelectric substrate and a trench formed adjacent to the at least one interdigital transducer electrode into the piezoelectric substrate and adapted to enhance confinement of acoustic wave energy provided by the at least one interdigital transducer electrode, the trench including an edge having a distance to a closest metal electrode finger of the at least one interdigital transducer electrode determined by a wavelength of a surface acoustic wave excited by the at least one interdigital transducer electrode, the distance of the edge of the trench to the closest metal electrode finger adapted to maximize a reflection of a surface acoustic wave excited by the at least one interdigital transducer electrode.
A radio frequency module comprising:
- a surface acoustic wave device including a piezoelectric substrate, at least one interdigital transducer electrode provided on the piezoelectric substrate and a trench formed adjacent to the at least one interdigital transducer electrode into the piezoelectric substrate and adapted to enhance confinement of acoustic wave energy provided by the at least one interdigital transducer electrode, the trench including an edge having a distance to a closest metal electrode finger of the at least one interdigital transducer electrode determined by a wavelength of a surface acoustic wave excited by the at least one interdigital transducer electrode, the distance of the edge of the trench to the closest metal electrode finger adapted to maximize a reflection of a surface acoustic wave excited by the at least one interdigital transducer electrode.
Dependencies are inferred from the claim text.