Photonic crystal surface light-emitting laser element
AssigneesKyoto University, Stanley Electric Co., Ltd.
InventorsSusumu Noda, Takuya Inoue, Kei Emoto, Tomoaki Koizumi
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Abstract
A photonic-crystal surface-emitting laser element includes: a first semiconductor layer formed by embedding a photonic crystal layer that includes air holes arranged with two-dimensional periodicity in a formation region in a plane parallel to the photonic crystal layer; an active layer formed on the first semiconductor layer; a second semiconductor layer formed on the active layer; and a mesa portion with a mesa shape formed at a surface of the second semiconductor layer, wherein the mesa portion is located inside the formation region of the air holes when viewed in a direction perpendicular to the photonic crystal layer.
Claims5
A photonic-crystal surface-emitting laser element including a photonic crystal layer, the photonic-crystal surface-emitting laser element comprising:
- a first semiconductor layer formed by embedding the photonic crystal layer that includes air holes arranged with two-dimensional periodicity in a formation region in a plane parallel to the photonic crystal layer;
- an active layer formed on the first semiconductor layer;
- a second semiconductor layer formed on the active layer;
- and
- a mesa portion with a mesa shape formed at a surface of the second semiconductor layer, the surface of the second semiconductor layer being flat,
- wherein the mesa portion is located inside the formation region of the air holes when viewed in a direction perpendicular to the photonic crystal layer,
- wherein the mesa portion is made of a translucent conductor, and
- wherein a pad electrode is located on the mesa portion.
Dependencies are inferred from the claim text.