Plasma processing apparatus

A plasma processing apparatus comprising:

• a chamber;
• a microwave output device configured to output microwaves provided into the chamber via a waveguide and an antenna;
• and
• a controller configured to control an operation of the microwave output device;
• wherein the microwaves outputted by the microwave output device include an output wave that transmits a power used for plasma generation and a broadband sweep wave group used for detection of a plasma state in the chamber,
• the microwave output device includes a modulator configured to modulate the microwaves and transmit the modulated microwaves to the waveguide, and a demodulator configured to receive, via the waveguide, and demodulate a reflected wave group obtained by the broadband sweep wave group being reflected by plasma in the chamber, the broadband sweep wave group being included in the microwaves transmitted to the waveguide by the modulator and provided into the chamber via the antenna,
• the controller is configured to determine a frequency of the output wave based on the reflected wave group, and control the microwave output device to output the output wave of the frequency, and
• the power of a sweep wave included in the broadband sweep wave group is less than the power of the output wave, and is 50 W or less.

A plasma processing apparatus comprising:

• a chamber;
• a microwave output device configured to output microwaves provided into the chamber via a waveguide and an antenna;
• and
• a controller configured to control an operation of the microwave output device;
• wherein the microwaves outputted by the microwave output device include an output wave that transmits a power used for plasma generation and a broadband sweep wave group used for detection of a plasma state in the chamber,
• the microwave output device includes a modulator configured to modulate the microwaves and transmit the modulated microwaves to the waveguide, and a demodulator configured to receive, via the waveguide, and demodulate a reflected wave group obtained by the broadband sweep wave group being reflected by plasma in the chamber, the broadband sweep wave group being included in the microwaves transmitted to the waveguide by the modulator and provided into the chamber via the antenna,
• the controller is configured to determine a frequency of the output wave based on the reflected wave group, and control the microwave output device to output the output wave of the frequency,
• the power of the output wave is 5000 W or less, the frequency of the output wave is 2400 to 2500 MHz, and
• the power of a sweep wave included in the broadband sweep wave group is less than the power of the output wave, and is 50 W or less.