System and method for delivering pulsed RF power from a single generator to multiple loads
AssigneeInspiring Atoms Pte Ltd
InventorYang Pan
Life of this patent
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Abstract
Disclosed herein is a system and method for delivering pulsed RF power from a single generator to multiple loads in semiconductor manufacturing processes. Using a Single-Pole Multi-Throw (SPMT) switch, the controller dynamically selects a load in real time to receive one or a group of pulses. Each pulse is configurable with distinct RF power, frequency, and duration, enabling precise and flexible power allocation to components such as plasma source coils, zonal electrostatic chucks, or multiple reactors.
Claims19
An RF system for a semiconductor manufacturing process system, comprising:
- an RF power generator configured to generate RF power in the form of a master pulse train;
- a plurality of coils of an inductively coupled plasma (ICP) source or a transformer coupled plasma (TCP) source to receive a subset of the pulses from the master pulse train;
- a single pole multi-throw (SPMT) switch configured to select a coil from the plurality of the coils to receive one pulse or a group of the pulses in the master pulse train;
- and
- a controller configured to coordinate the operations of the RF power generator and the SPMT switch.
An RF system for a semiconductor manufacturing process system, comprising:
- an RF power generator configured to generate RF power in the form of a master pulse train;
- a plurality of loads including independently biased zones of a zonal electrostatic chuck (ESC) to receive a subset of the pulses from the master pulse train;
- a SPMT switch configured to select a zone from the plurality of the zones to receive one pulse or a group of the pulses in the master pulse train;
- and
- a controller configured to coordinate the operations of the RF power generator and the SPMT switch.
An RF system for a semiconductor manufacturing process system, comprising:
- an RF power generator configured to generate RF power in the form of a master pulse train;
- a plurality of loads including reactors within a process system to receive a subset of the pulses from the master pulse train;
- a SPMT switch configured to select a reactor from the plurality of the reactors to receive one pulse or a group of the pulses in the master pulse train;
- and
- a controller configured to coordinate the operations of the RF power generator and the SPMT switch.
Dependencies are inferred from the claim text.