High power generator and method of supplying high power pulses
AssigneeTrumpf Huettinger Sp. Z O. O.
InventorsAndrzej Klimczak, Andrzej Gieraltowski, Michal Balcerak
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Abstract
A high power (HP) generator includes a plurality of low power (LP) generators, a coupling in which the plurality of LP generators is electrically connected, and a control unit. During operation, at least in some states of the HP generator, a coupling-value at an output of the coupling is higher than an LP-generator-value at an output of one of the plurality of LP generators. The control unit is configured to select a respective contribution of each of the plurality of LP generators in order to generate a rise and/or a decay of a pulse at the output of the coupling. The HP generator is at least partially directly liquid cooled, by being immersed in a dielectric cooling liquid.
Claims20
A high power (HP) generator configured to deliver a pulsed high power with a high voltage value and/or a high current value to a capacitive load, the HP generator comprising:
- a plurality of low power (LP) generators,
- each respective LP generator comprising a respective energy storage component, wherein, during operation, the respective energy storage component is charged to a respective predefined value related to the respective energy storage component,
- each respective LP generator configured to supply, during operation, at an output thereof a respective LP-generator-value, which corresponds to the respective predefined value of the respective energy storage component incorporated in the respective LP generator,
- a coupling in which the plurality of LP generators is electrically connected such that a coupling-value at an output of the coupling, which corresponds to an output value at an output of the HP generator, is obtainable, and wherein, during operation, at least in some states of the HP generator, the coupling-value is higher than the LP-generator-value at the output of one of the plurality of LP generators, and
- a control unit configured to select a respective contribution of each of the plurality of LP generators to the output value of the HP generator during power delivery of the HP generator, in order to generate a rise and/or a decay of a pulse at the output of the coupling,
- wherein each of the plurality of LP generators are arranged within a single liquid-proof housing through which dielectric cooling liquid is configured to flow such that the HP generator is at least partially directly liquid cooled by being immersed in the dielectric cooling liquid.
A method of supplying a plasma process with high power pulses having varying amplitudes provided by a high power (HP) generator, the HP generator comprising a plurality of low power (LP) generators electrically connected in a coupling, each respective LP generator comprising a respective energy storage component, the method comprising:
- a. continuously charging the respective energy storage component of each respective LP generator of the plurality of LP generators to a respective predefined value,
- b. selectively coupling output values of at least some of the plurality of LP generators to obtain a desired output value of the HP generator corresponding to a pulse having a desired amplitude, by controlling the plurality of LP generators, and
- c. cooling each of the plurality of LP generators by using a dielectric cooling liquid configured to flow through a single liquid-proof housing, each of the plurality of LP generators being arranged within the single liquid-proof housing.
A high power (HP) generator configured to deliver a pulsed high power with a high voltage and/or a high current to a capacitive load, the HP generator comprising:
- a plurality of low power (LP) generators,
- each respective LP generator comprising a respective energy storage component, wherein, during operation, the respective energy storage component is charged to a respective predefined voltage of a capacitor related to the respective energy component and/or a current of an inductor related to the respective energy storage component,
- each respective LP generator configured to supply, during operation, at an output thereof, a respective LP generator voltage and/or current corresponding to the respective predefined voltage of the capacitor and/or current of the inductor related to the respective energy storage component incorporated in the respective LP generator,
- a connection in which the plurality of LP generators is electrically connected such that a connection voltage, current, and/or power at an output of the connection, which corresponds to an output voltage, current, and/or power at an output of the HP generator, is obtainable, and wherein, during operation, at least in some states of the HP generator, the connection voltage, current, and/or power is higher than the LP generator voltage and/or current at the output of one of the plurality of LP generators, and
- a control unit configured to select a respective voltage and/or current contribution of each of the plurality of LP generators to the output of the HP generator during power delivery of the HP generator, in order to generate a rise and/or a decay of a pulse at the output of the connection,
- wherein each of the plurality of LP generators are arranged within a single liquid-proof housing through which dielectric cooling liquid is configured to flow such that the HP generator is at least partially immersed in the dielectric cooling liquid.
Dependencies are inferred from the claim text.