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US 12,755,922 B1Granted
Method of fabricating a high-pressure laser-sustained-plasma lamp
AssigneeKLA Corporation
InventorsMark S. Wang, Joshua Wittenberg
Life of this patent
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Abstract
A method of forming a high-pressure plasma lamp includes providing a lamp bulb. The lamp bulb includes a top channel and a bottom channel. The method includes inserting a top electrode element into the top channel of the lamp bulb. The method includes providing a glass tubular structure attached to a bottom electrode element. The method includes filling the lamp bulb with a liquified gas through the bottom channel of the lamp bulb. The method includes inserting the bottom electrode element and the glass tubular structure into the bottom channel.
Claims7
A high-pressure plasma lamp comprising:
- a lamp bulb, the lamp bulb comprising a lamp body;
- a top channel;
- and a bottom channel;
- a top electrode element sealed within the top channel;
- and
- a bottom electrode element sealed within a glass tubular structure, the glass tubular structure sealed within the bottom channel, wherein an interior wall of the bottom channel is sealed to an exterior wall of the glass tubular structure, wherein the bottom electrode element includes a multi-step thickness profile, wherein an internal structure of the glass tubular structure conforms to a portion of the multi-step thickness profile of the bottom electrode element and wherein the outer surface of the bottom electrode element and the outer surface of the glass tubular structure are coextensive,
- wherein the lamp bulb contains a gas and is configured to generate a plasma within the lamp bulb.
4 more elements
Dependencies are inferred from the claim text.