Inductor coil and forming method thereof

An inductor coil, comprising:

• a substrate;
• a plurality of stacked coil layers being on the substrate, each coil layer including a plurality of sub-coil structures on a same layer;
• and
• a plurality of electrical connection layers between two adjacent coil layers, a projection pattern of each of the plurality of electrical connection layers on a surface of the substrate being within a range of projection patterns of two adjacent coil layers that are in contact with the plurality of electrical connection layers on the surface of the substrate, all the plurality of coil layers being connected in parallel through all the plurality of electrical connection layers, and any section that is perpendicular to the substrate and simultaneously passes through all the plurality of sub-coil structures in two adjacent coil layers passes through an electrical connection layer,
• wherein
• each electrical connection layer includes a plurality of sub-connection structures in a same layer, and an upper surface and a lower surface of each sub-connection structure respectively contact the sub-coil structures on different layers;
• a number of sub-connection structures included in each electrical connection layer is greater than one, and the sub-connection structures are arranged in concentric rings;
• and
• a number of sub-connection structures is less than a number of sub-coil structures in a same layer.

A method of forming an inductor coil, comprising:

• providing a substrate;
• and
• forming a plurality of stacked coil layers on the substrate, and a plurality of electrical connection layers between two adjacent coil layers, a projection pattern of each of the plurality of electrical connection layers on a surface of the substrate being in a range of projection patterns of two adjacent coil layers in contact with the electrical connection layers on the surface of the substrate;
• and
• each coil layer including a plurality of sub-coil structures in a same layer, all the plurality of coil layers being connected in parallel through all the plurality of electrical connection layers, and any section that is perpendicular to the substrate and simultaneously passes through all the plurality of sub-coil structures in two adjacent coil layers passing through an electrical connection layer,
• wherein
• each electrical connection layer includes a plurality of sub-connection structures in a same layer, and an upper surface and a lower surface of each sub-connection structure respectively contact the sub-coil structures on different layers;
• a number of sub-connection structures included in each electrical connection layer is greater than one, and the sub-connection structures are arranged in concentric rings;
• and
• a number of sub-connection structures is less than a number of sub-coil structures in a same layer.