Substrate inspection method, recording medium, and substrate inspection device

A substrate inspection device, comprising:

• a first input image acquirer configured to acquire a reference input image based on a captured image of a surface of a reference substrate;
• a first intermediate information acquirer configured to acquire, when the reference input image is inputted into a neural network previously constructed to output a recognition result of an image inputted thereto, reference intermediate information generated in an intermediate layer of the neural network;
• a first feature image generator configured to generate a reference feature image representing a feature of the reference input image based on the reference intermediate information;
• a second input image acquirer configured to acquire an inspection input image based on a captured image of a surface of an inspection target substrate;
• a second intermediate information acquirer configured to acquire inspection intermediate information generated in the intermediate layer of the neural network when the inspection input image is inputted into the neural network;
• a second feature image generator configured to generate an inspection feature image representing a feature of the inspection input image based on the inspection intermediate information;
• and
• an abnormality determiner configured to determine presence or absence of an abnormality on the surface of the inspection target substrate based on a result of comparing the reference feature image and the inspection feature image.